LIGHTWEIGHT HIGH RIGID CERAMIC MEMBER,申请号JP20040007804-传众专利搜索

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发明名称	LIGHTWEIGHT HIGH RIGID CERAMIC MEMBER
摘要	PROBLEM TO BE SOLVED: To provide a lightweight high rigid ceramic member which is suitable for a member moving fast in a semiconductor manufacturing equipment, or the like. SOLUTION: The ceramic member 10 has a honeycomb structure member 13 having a plurality of columnar space 12 partitioned by a bulkhead 11, and a plate member 14. The aperture of the honeycomb structure member 13 is set to 3 mm to 20 mm, a Young's modulus of the bulkhead 11 is set to 200 GPa or more, and the thickness of the bulkhead 11 is set to 0.2 mm to 3 mm. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号	JP2005203537(A)	申请公布日期	2005.07.28
申请号	JP20040007804	申请日期	2004.01.15
申请人	TAIHEIYO CEMENT CORP	发明人	TSUTO HIROYUKI;TAKEI YOSHIBUMI;AOKI ICHIRO;HIKITA TOMOYUKI;SHIOGAI TATSUYA
分类号	H01L21/68;H01L21/027;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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