| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for canceling a reaction force caused by the drive of an object while relaxing limitation to a driving pattern for driving the object in an X direction and a Y direction. SOLUTION: The device comprises a first actuator for driving the object in the X direction and the Y direction, second actuators 32, 132, 33 and 133 for driving reaction force counters YR, YL, XB and XF for receiving a reaction force when the actuator drives the object, and a control unit 100 for controlling the second actuator based on a position of the object in the X direction and the Y direction to cancel the reaction force received by the reaction force counter by means of the second actuator when the object is driven by the first actuator. COPYRIGHT: (C)2005,JPO&NCIPI |
