发明名称 Insulating film composition having improved mechanical property
摘要 An insulating film forming composition having good mechanical and insulating properties comprises a silica sol having a good dispersion stability, an organic siloxane polymer and a hydrophobic organic solvent, wherein the silica sol has primary-particles having an average particle size of 5 to 15 nm and secondary-particles having an average particle size of 70 to 100 nm, and the combined amount of said primary and secondary silica particles is in the range of 2 to 50% by weight based on the sum of the silica particles and organic siloxane polymer.
申请公布号 US2005159001(A1) 申请公布日期 2005.07.21
申请号 US20040021048 申请日期 2004.12.22
申请人 KIM TAEWAN;RHEE JIHOON;PARK DAECHUL;SEON JONGBAEK;LEE KWANGHEE;JUNG HYUNDAM 发明人 KIM TAEWAN;RHEE JIHOON;PARK DAECHUL;SEON JONGBAEK;LEE KWANGHEE;JUNG HYUNDAM
分类号 C09D183/02;C09D183/04;H01L21/312;H01L21/314;H01L21/316;H01L21/768;(IPC1-7):H01L21/302;H01L21/461 主分类号 C09D183/02
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