发明名称 |
Insulating film composition having improved mechanical property |
摘要 |
An insulating film forming composition having good mechanical and insulating properties comprises a silica sol having a good dispersion stability, an organic siloxane polymer and a hydrophobic organic solvent, wherein the silica sol has primary-particles having an average particle size of 5 to 15 nm and secondary-particles having an average particle size of 70 to 100 nm, and the combined amount of said primary and secondary silica particles is in the range of 2 to 50% by weight based on the sum of the silica particles and organic siloxane polymer.
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申请公布号 |
US2005159001(A1) |
申请公布日期 |
2005.07.21 |
申请号 |
US20040021048 |
申请日期 |
2004.12.22 |
申请人 |
KIM TAEWAN;RHEE JIHOON;PARK DAECHUL;SEON JONGBAEK;LEE KWANGHEE;JUNG HYUNDAM |
发明人 |
KIM TAEWAN;RHEE JIHOON;PARK DAECHUL;SEON JONGBAEK;LEE KWANGHEE;JUNG HYUNDAM |
分类号 |
C09D183/02;C09D183/04;H01L21/312;H01L21/314;H01L21/316;H01L21/768;(IPC1-7):H01L21/302;H01L21/461 |
主分类号 |
C09D183/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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