发明名称 |
Fabrication method for arranging ultra-fine particles |
摘要 |
A method and resultant device, in which metal nanoparticles are self-assembled into two-dimensional lattices. A periodic hole pattern (wells) is fabricated on a photoresist substrate, the wells having an aspect ratio of less than 0.37. The nanoparticles are synthesized within inverse micelles of a polymer, preferably a block copolymer, and are self-assembled onto the photoresist nanopatterns. The nanoparticles are selectively positioned in the holes due to the capillary forces related to the pattern geometry, with a controllable number of particles per lattice point. |
申请公布号 |
US2005158988(A1) |
申请公布日期 |
2005.07.21 |
申请号 |
US20040759589 |
申请日期 |
2004.01.15 |
申请人 |
LEE SEUNG-HEON;DIANA FREDERIC S.;BADOLATO ANTONIO;PETROFF PIERRE M.;KRAMER EDWARD J. |
发明人 |
LEE SEUNG-HEON;DIANA FREDERIC S.;BADOLATO ANTONIO;PETROFF PIERRE M.;KRAMER EDWARD J. |
分类号 |
G11B5/706;H01F1/00;H01F1/153;H01L21/4763;(IPC1-7):H01L21/476 |
主分类号 |
G11B5/706 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|