| 摘要 |
PROBLEM TO BE SOLVED: To spread a liquid resin upon a surface of a substrate in a uniform coating thickness and width. SOLUTION: A support plate 2 which can move horizontally and perpendicularly with respect to the surface of the substrate Pa is provided with a storage tank 4 and a coating means 5 for the liquid resin. The liquid resin in the storage tank 4 is supplied from a roller 51 for drawing the liquid resin contained in the coating means 5 to a transfer roller 53 through an intermediate roller 52. The liquid resin is applied to the surface of the substrate Pa with the transfer roller 53. COPYRIGHT: (C)2005,JPO&NCIPI
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