| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dressing tool capable of suppressing falling-off of diamond abrasive grains, wear on a surface, and the contamination of metallic components. <P>SOLUTION: In the dressing tool 1, diamond abrasive grains 3 are held on a base element 7 surface through a bonding agent 4, and slid on a polishing pad surface to remove clogging. The dressing tool 1 has a plurality of through holes 5 into which the diamond abrasive grains 3 are inserted, and the diamond abrasive grains 3 are exposed from the through holes 5 on a front surface side. On a back surface side, a plate bonded on the base element 7 surface by the bonding agent 4 is equipped. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
