| 摘要 |
PROBLEM TO BE SOLVED: To provide a molding member which is coated with a carbon film having an extremely thin film thickness and high heat resistance and characterized in that the base material has a high-hardness surface, excellent in abrasion resistance, thermal stability, high-temperature mold releasability, chemical stability, surface smoothness, the adhesion of the carbon film and the base material, hight-temperature moldability and also excellent in precise moldability of a nanometer order unit and mold releasability, and also to provide its manufacturing method and a manufacturing apparatus usable therein. SOLUTION: This molding member is manufactured by forming an intermediate layer film, which contains at least one of silicon, silicon carbide, silicon oxide, silicon nitride, chromium, chromium carbide, chromium oxide, chromium nitride, tungsten, tungsten carbide, tungsten oxide, tungsten nitride, titanium, titanium carbide, titanium oxide, titanium nitride, molybdenum, molybdenum carbide, molybdenum oxide and molybdenum nitride under the irradiation with a gas cluster ion beam and forming the carbon film on the intermediate layer film under the irradiation with the gas cluster ion beam. COPYRIGHT: (C)2005,JPO&NCIPI
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