| 摘要 |
PROBLEM TO BE SOLVED: To provide floating conveying equipment and method in which charging due to stripping is prevented and a panel can be conveyed while neutralizing local charging appropriately. SOLUTION: The equipment for conveying a substrate 6 while floating from a conveyance table 1 comprises a first gas pipe 7 forming a hole 2 for jetting floating control gas of the substrate 6, a mechanism 3 for detecting local charging potential of the substrate 6, a mechanism 4 provided on the downstream side of the charging detection mechanism 3 in the conveying direction and neutralizing charging of the substrate 6, and a control section 5 as a control means connected with the charging detection mechanism 3 and the charging neutralization mechanism 4 and generating ions in the charging neutralization mechanism 4 depending on the charging potential of the substrate 6 detected by the charging detection mechanism 3. COPYRIGHT: (C)2005,JPO&NCIPI
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