| 摘要 |
PROBLEM TO BE SOLVED: To stably convey an object in the floating state by restraining bending of a vibrating plate even if the length of the vibrating plate is increased in using a long vibration plate to convey the object in the floating state. SOLUTION: An object floating conveying apparatus 11 includes a plurality of acoustic wave floating units 12a, 12b, wherein the respective acoustic wave floating units 12a, 12b excite the vibrating plate 15 by an excitation means to convey the object 16 by radiation pressure of the acoustic wave from the vibrating plate 15. An acoustic wave reflecting means 28 for reflecting acoustic waves generated from the vibrating plate 15 in exciting the vibrating plate 15 is provided on a support plate 4. The acoustic wave reflecting means 28 is provided with a reflector 31 having a reflection surface 31a, and disposed in a position to restrain bending of the vibration plate by reflecting the acoustic wave toward the vibrating plate 15. The reflecting plate 31 is provided in a position opposite to the center of the vibrating plate 15, and the reflection surface 31a is provided intersecting perpendicularly to a plurality of vibrating plates 15 constituting both acoustic wave floating units 12a, 12b. COPYRIGHT: (C)2005,JPO&NCIPI
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