| 摘要 |
Precision polishing equipment polishes a general surface, such as an aspheric optical surface. A polishing element is rotatably mounted in a frame of the equipment. Polishing element has a compliant polishing member fixedly mounted to a substantially rigid support member. Compliant polishing member has plurality of spaced polishing portions for engaging the surface to be polished and trapping polishing fluid between the interface of the surface to be polished and nearest polishing portion in contact with the surface. Important advantages derived from the polishing equipment of the invention are that it can efficiently polish a general surface, such as an aspheric optical surface, and it enables the polishing fluid to evenly flow across the surface to be polished.
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