发明名称 |
Correction member, retainer, exposure apparatus, and device fabrication method |
摘要 |
A correction member for correcting a gravity deformation of an optical element includes a first unit for applying an elastic force to the optical element substantially in an anti-gravity direction, and a second unit, arranged opposite to the first unit through the optical element, for applying an elastic force to the optical element substantially in a gravity direction.
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申请公布号 |
US6909493(B2) |
申请公布日期 |
2005.06.21 |
申请号 |
US20030388822 |
申请日期 |
2003.03.14 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SUDOH YUJI |
分类号 |
G02B7/02;(IPC1-7):G03B27/54;G03B7/02;G03B27/58;G03B27/62 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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