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发明名称
Способ осаждени пленки фосфоросиликатного стекла
摘要
申请公布号
RU1651698(C)
申请公布日期
2008.01.20
申请号
SU19894747214
申请日期
1989.10.09
申请人
Научно-производственное объединение "Интеграл"
发明人
Турцевич А.С.;Красницкий В.Я.;Шкут А.М.;Кастрицкий Л.В.;Петрашкевич В.Ф.;Вискуп А.П.
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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