发明名称 |
VACUUM PUMP AND METHOD OF STARTING THE SAME |
摘要 |
The present invention relates to a vacuum pump and a method of starting a vacuum pump. The vacuum pump includes a pump rotor (1) rotatably disposed in a casing (2), and a pump- rotor controller (15) for controlling rotation of the pump rotor (1) in a forward direction or a reverse direction in accordance with a predetermined pattern at the time of starting the vacuum pump. |
申请公布号 |
KR20050059076(A) |
申请公布日期 |
2005.06.17 |
申请号 |
KR20057002801 |
申请日期 |
2005.02.18 |
申请人 |
EBARA CORPORATION |
发明人 |
IIJIMA NAOKI;WATANABE JIRO;CHINO HIROYUKI;YANAGISAWA KIYOSHI;KAWAMURA TAKESHI |
分类号 |
F04C13/00;F04C18/12;F04C18/16;F04C28/06;F04C28/28;F04D19/04;F04D27/02;(IPC1-7):F04C29/10 |
主分类号 |
F04C13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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