| 摘要 |
A process for minimizing and even eliminating over-sized particles in a vapor phase synthesis of metal oxide-containing particles comprising reacting oxygen with one of more vapor streams comprising a titanium halide, a silicon halide and a compound selected from the group consisting of phosphorous, germanium, boron, tin, niobium, chromium, silver, gold, palladium aluminum, and mixtures thereof in a plug flow, plasma reactor.
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