| 摘要 |
PROBLEM TO BE SOLVED: To provide an anisotropic conduction sheet capable of obtaining good conduction without damaging a wafer to be measured or electrode terminals of a measuring instrument by the weight loaded. SOLUTION: The anisotropic conduction sheet is composed of an insulation sheet 1, a plurality of through-holes 2 penetrating through the insulation sheet 1 in the direction of the thickness thereof, a conductive metallic part 4 formed in respective through-holes 2, and partial exposed parts which are the part of the conductive metallic part extended from the corner part of the through-hole and the insulation sheet and exposed in flat-shape. By extending the area contacting with external electrodes, an sufficient conduction can be obtained wit a slight load. COPYRIGHT: (C)2005,JPO&NCIPI
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