A SOURCE HEAD ARC CHAMBER OF ION IMPLANTATION MACHINE,申请号KR20030083793-传众专利搜索

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发明名称	A SOURCE HEAD ARC CHAMBER OF ION IMPLANTATION MACHINE
摘要
申请公布号	KR20050050000(A)	申请公布日期	2005.05.27
申请号	KR20030083793	申请日期	2003.11.24
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	JUNG, YOUNG DONG;JOO, YOUNG BYEONG
分类号	(IPC1-7):H01L21/265	主分类号	(IPC1-7):H01L21/265
代理机构		代理人
主权项
地址

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