SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD,申请号EP20030730715-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
摘要
申请公布号	EP1532668(A1)	申请公布日期	2005.05.25
申请号	EP20030730715	申请日期	2003.05.30
申请人	EBARA CORPORATION	发明人	KATSUOKA, SEIJI;SEKIMOTO, MASAHIKO;WATANABE, TERUYUKI;OGAWA, TAKAHIRO;KOBAYASHI, KENICHI;MIYAZAKI, MITSURU;MOTOJIMA, YASUYUKI;YOKOYAMA, TOSHIO
分类号	C23C18/16;C25D7/12;C25D17/00;C25D17/02;H01L21/00;(IPC1-7):H01L21/02;H01L21/304;C23C18/00;C25C7/00;C25D5/00	主分类号	C23C18/16
代理机构		代理人
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