| 摘要 |
PROBLEM TO BE SOLVED: To improve the accuracy of detecting the point of origin in a length measuring machine which holds an object to be measured by two probes and measures dimensions, on the basis of a displacement on the holding position of the probes from the standard position (the point of origin) of the probes. SOLUTION: A moving probe 36 and a standard probe 60, which hold the object to be measured, are brought into direct contact with each other. Under this condition, air is intermittently supplied to a static pressure bearing 32 supporting a moving cylinder 16. The moving cylinder 16 within a bearing gap, moves upward, when air is supplied and moves downward, when the supply is cut off. Accompanying the movement, the moving probe 36 fixed to the moving cylinder 16 moves upward or downward to be adjusted with respect to the standard probe 60. After the adjustment, the two probes are brought into abutment against each other again, wherein the position is set as the origin point. COPYRIGHT: (C)2005,JPO&NCIPI
|
