HEAT TREATMENT DEVICE, HEAT TREATMENT METHOD, AND MANUFACTURING METHOD OF IMAGE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a heat treatment device capable of uniformly heating and cooling a base plate in a shorter time than before. SOLUTION: The heat treatment device for heating the base plate and a structure arranged on a front face of the base plate having heat a capacity smaller than the base plate comprises a first heater arranged so as to face a back surface of the base plate, a first cooling body for cooling the base plate arranged so as to face the base plate with an interposition of the first heater, and a second heater with a smaller heat value than the first heater, arranged so as to face the front surface of the base plate. COPYRIGHT: (C)2005,JPO&NCIPI