| 摘要 |
An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12). |
| 申请人 |
CARL ZEISS SMT AG;HEINTEL, WILLI;KIRCHNER, HARALD;KELLER, WOLFGANG;KWAN, YIM-BUN, PATRICK;FROMMEYER, ANDREAS;MORRISON, FRASER, G. |
发明人 |
HEINTEL, WILLI;KIRCHNER, HARALD;KELLER, WOLFGANG;KWAN, YIM-BUN, PATRICK;FROMMEYER, ANDREAS;MORRISON, FRASER, G. |
