| 摘要 |
Disclosed is a piezo actuator, e.g. for actuating a mechanical component. Said piezo actuator comprises a multilayer structure of piezo layers and inner electrodes (2, 3) which are disposed perpendicular to the effective direction (6, 7) between the piezo layers and can be impinged upon by a voltage via outer electrodes in order to actuate the piezo actuator. An electrical sensor signal that is proportionate to the actuation of the piezo actuator (1) can be picked up via additional outer electrodes (10, 11) on additional piezo layers comprising inner electrodes (8, 9). The piezo layers for the actuator part and the piezo layers for the at least one sensor part are integrated in one component as a piezo actuator (1) such that individual piezo layers for the sensor part are disposed at predefined distances or also next to each other between the piezo layers for the actuator part. |
