| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve durability of a discharge electrode, and improve reliability of a device. <P>SOLUTION: This is provided with the discharge electrode (13), and a counter electrode (14) opposed to the discharge electrode (13). The discharge electrode (13) is provided with an electrode substrate (13a) and a plurality of discharge parts (13b) protruded toward the counter electrode (14) from both end faces in the thickness direction of the electrode substrate (13a), and formed in a sawtooth shape. The discharge parts (13b) are formed in a triangular plate shape in plan view, a base end part of the electrode substrate (13a) side is formed more thick-walled than the tip, and furthermore a tapered face (13d) is formed so that the thickness of the discharge parts (13b) will become gradually thicker from the tip toward the base end part. By this, because an increasing rate of a cross sectional area in the direction from the tip toward the base end part of the discharge parts (13b) becomes larger, retreating amount of the tip of the discharge parts (13b) due to the discharge is suppressed. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
