| 摘要 |
PROBLEM TO BE SOLVED: To provide a slide type valve device having a very small flow channel and improved in its sealability and slidability in a slide type micro valve having small movable valve element and fixed valve element. SOLUTION: This slide type valve device has a first member and a second member relatively displaceably mounted. At least one member 160 of the first and second members has a through hole 162 as the flow channel in which the fluid can flow, and has an opening part connected with the through hole 162. A surface treatment part 161 to which the predetermined surface treatment is performed, is formed on the whole surface of the member 160 excluding a part having the through hole 162. COPYRIGHT: (C)2005,JPO&NCIPI
|
