发明名称 TESTING SYSTEM, TESTING METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a testing system and testing method which is capable of testing with a constant accuracy regardless of its process capabilities, and also to provide a method of manufacturing an electronic device using these. SOLUTION: The testing system comprises a testing device 1 which selectively extracts test pieces as samples from a population, and tests the extracted test pieces for their product characteristics; a main storage device 3 which stores testing information used for testing the test pieces and analysis information used for analyzing the testing results of the testing device; a testing results analysis means 52 which analyzes statistical data of the testing results, and/or the confidence interval of the mean value of the population based on the analysis information; and an extraction number calculating means 54 which calculates the number of test pieces to be extracted which should be tested by the testing device 1, based on the analysis results of the testing results analysis means 52. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005101224(A) 申请公布日期 2005.04.14
申请号 JP20030332214 申请日期 2003.09.24
申请人 TOSHIBA CORP 发明人 ASANO MASASHI
分类号 H01L21/66;H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/66
代理机构 代理人
主权项
地址