发明名称 Structure having recesses and projections, method of manufacturing structure, and functional device
摘要 A structure having recesses and projections is provided. A method of manufacturing the structure comprises the steps of preparing a first substrate having a projection, forming a first layer on the projection, transferring the first layer to a second substrate, and forming a recessed/projected surface structure in the second substrate by using the first layer.
申请公布号 US6878634(B2) 申请公布日期 2005.04.12
申请号 US20030396397 申请日期 2003.03.26
申请人 CANON KABUSHIKI KAISHA 发明人 IMADA AYA;DEN TOHRU
分类号 B81C1/00;G03F7/00;(IPC1-7):H01L21/311;H01L21/302 主分类号 B81C1/00
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