DRYER

摘要

PROBLEM TO BE SOLVED: To safely perform efficient and stable drying and suppress the quantity of use of a water-soluble organic solvent. SOLUTION: A dryer has a box having a hollow inner space; nozzles provided in the inside of the box; a first feeding means for feeding a water-soluble organic solvent to the nozzles; a second feeding means for feeding an inert gas to the inside of the box; an exhausting means for exhausting to the external of the box the mixed gas with each other comprising the organic solvent gas so produced as to jet from the nozzles to the inside of the box the water-soluble organic solvent fed by the first feeding means and the inert gas fed to the inside of the box by the second feeding means; and an introducing means for introducing the mixed gas exhausted by the exhausting means into a drying vessel wherein dried objects are stored. COPYRIGHT: (C)2005,JPO&NCIPI