| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment apparatus which is easy in maintenance owing to the adoption of a drawing structure. SOLUTION: A unit base 47 is supported forward/backward movably by a slider 49 in relation to a frame 51. The unit base 47 is made to communicate/be connected with the frame 51 by a freely expandable/contractable exhaust duct 67, process liquid piping, and drain piping. Since the unit base 47 can freely be drawn from the frame 51, the maintenance is easy. Moreover, since the unit base 47 is connected with the frame 51 to be able to function, the unit base 47 can be actuated as usual even when the unit base 47 is drawn out. COPYRIGHT: (C)2005,JPO&NCIPI |
