摘要 |
PROBLEM TO BE SOLVED: To solve a problem that, when a conductive adhesive material for bonding and fixing a piezoelectric vibrator is heated in a vacuum, the glass component of a glass-sealing material is evaporated, making it difficult to realize vacuum lock. SOLUTION: The vessel for accommodating a piezoelectric vibrator comprises an insulating substrate 1, having a recess 1a for accommodating and mounting a piezoelectric vibrator 3 and thereon, and a plate-like lid member 2 joined to the upper surface of the substrate 1 via a glass-sealing material 10 so as to cover the recess 1a and having a through-hole 6 passing through the upper and lower surfaces. The glass-sealing material 10 includes a glass component, containing 65-80 percent of bismuth oxide by mass, 5-15 percent of sodium oxide by mass, 2-10 percent of boron oxide by mass, 1-5 percent of barium oxide by mass, 1-5 percent of copper oxide by mass, 0.5-2 percent of aluminum oxide by mass, 0.5-2 percent of silicon oxide by mass, and 0.5-2 percent of zinc oxide by mass; and also includes a willemite compound as 20-40 parts of filler by mass, when the glass component is set as 100 parts by mass. COPYRIGHT: (C)2005,JPO&NCIPI
|