| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a multilayer ceramic substrate by which the multilayer ceramic substrate having excellent dimensional precision in a firing process is manufactured and a firing shrinkage suppressing sheet is properly and efficiently removed after the firing. <P>SOLUTION: This method for manufacturing the multilayer ceramic substrate includes a lamination process for forming a multiple laminated body fs by laminating a plurality of green sheets s1-s3 and the firing shrinkage suppressing sheets y1 and y2 respectively arranged on the surface 1 and the back surface 2 of the green sheets 1s and 3s as the uppermost layer and the lowermost layer and having a firing temperature higher than the firing temperature of the green sheets 1s and 13, a firing process for firing the multiple laminated body fs at a firing temperature of the green sheets s1-s3 and a removing process for removing the unfired firing shrinkage suppressing sheets y1 and y2 on the multiple laminated body fs after firing. The removing process is carried out by giving thermal change such as by the contact with cooled water or cooled medium to the multiple laminated body fs after the firing. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
