| 摘要 |
The object of this invention is to provide methods for correcting an astigmatic difference inherent to the condensation performance analysis system itself in the absence of an optical element for correcting astigmatism. The method can contribute to a reduction in the number of components and the associated cost required for analyzing the astigmatic difference of an optical system. The present invention corrects astigmatism by processing data through computer software prior to analyzing the astigmatic difference of an optical device, instead of using an optical element for the astigmatism correction.
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