| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic substrate with a low-cost projection electrode in a high mounting accuracy without inclining the projection electrode by a simple process. SOLUTION: The method for manufacturing the ceramic substrate 10 with the protrusion electrode provides the protrusion electrode 13 on a surface. The method includes a step of preparing a resin sheet 17 for gasifying ceramic green sheets 16, 16a and 16b at a temperature of their sintering temperature or lower; a step of perforating a through hole 18 at the resin sheet 17, printing a metal conductor for a circuit wiring pattern 15 on a front surface, and filling a metal conductor for a via 14 in the through hole 18; a step of perforating a through hole 18a in the resin sheet 17; a step of superposing the ceramic green sheets 16, 16a and 16b and the resin sheet 17, thermally press bonding them, and forming a laminate 19. Further, the method also includes a step of gasifying and sintering the resin sheet 17 by baking the laminate 19, and forming the protrusion electrode 13 on a ceramic circuit substrate 12. COPYRIGHT: (C)2005,JPO&NCIPI
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