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发明名称
用于半导体制造设备的程序控制之方法
摘要
一种于半导体制造工具上之缺陷辨识方法,其包含监视工具感测器输出、依据该等多数个感测器输出而建立工具状态特点、捕捉缺陷情况之感测器资料指示、建立此缺陷特点之资料库、比较当前工具特点与缺陷特点以确认一缺陷情况且预估此一缺陷情况于制程输出上之影响。该缺陷库利用有系统的方式以归纳出缺陷或者利用在它们发生之后添加已知缺陷特点而被建构。
申请公布号
TW200506560
申请公布日期
2005.02.16
申请号
TW093115311
申请日期
2004.05.28
申请人
科学系统研究有限公司
发明人
霍普金斯 麦可;史肯兰 约翰;欧莱利 凯文;卡贝利 玛库斯
分类号
G05B19/02;H01L21/66
主分类号
G05B19/02
代理机构
代理人
恽轶群;陈文郎
主权项
地址
爱尔兰
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