| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma processing apparatus having such a structure that a plasma processing head can be easily placed on a roller conveyer. <P>SOLUTION: Paired head supports 70 are arranged on both sides of the roller conveyer 10 respectively in the direction perpendicular to the direction that the object W to be treated is conveyed. Both ends of the plasma processing head 20 are placed on the supports 70 respectively and the head 20 is bridged between the paired supports 70 so as to cover the conveyer 10. The head 20 is constituted so that a treating gas is made to pass through the space between internal electrodes and blown downward. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
