| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a beam radiating device with a simple structure in which a defect extended radially in a work can be detected. <P>SOLUTION: The beam radiating device is provided with a casing 3 forming a ring with a circular hole 2 pierced in the center, and a plurality of beam emission elements 4 which are provided to be lined up in the casing 3 so that the optical axis CT is extended toward a central axis line of the circular hole 2. The surface of the work CP installed below the circular hole 2 is irradiated by a low angle beam emitted from the beam emission elements 4 in the beam radiating device. A beam modulating part 6 is provided for modulating the low angle beam emitted from the beam emission elements 4 to contain more components in the peripheral direction in the circular hole 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
