METHOD AND EQUIPMENT FOR DISCHARGING DROPLET, DEVICE AND MANUFACTURING METHOD THEREFOR, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To stabilize the quantity of functional liquid discharged from respective discharge nozzles. SOLUTION: The subject droplet-discharging method comprises a functional-liquid-discharge-arrangement step, an inspection step, and a heating step. In the functional-liquid discharge-arrangement step, the functional liquid is discharged in a specified region of a substrate from a plurality of discharge-nozzles 100a formed in a discharge head 100 so as to put the functional liquid of a specified quantity in the specified region on the substrate W. In the inspection step, variations in the speed of flying functional-liquid is measured by a laser ray. In the heating step, the functional liquid is heated in a plurality of places corresponding to the longitudinal direction of the discharge head 100 on the basis of the results in the inspection step. COPYRIGHT: (C)2005,JPO&NCIPI