FILM FORMING DEVICE, FILM FORMING METHOD, ORGANIC EL ELEMENT, AND METHOD FOR MANUFACTURING THE ELEMENT

摘要

PROBLEM TO BE SOLVED: To enable film forming to obtain excellent pattern forming precision or uniformity of film thickness in conducting the film forming for a substrate having a relative large area. SOLUTION: A substrate 1 on which the film forming is conducted is provided with a linear arrangement film forming source 20 having at least a plurality of film forming cells 20a arranged in a straight line, and the film forming is conducted on the substrate while moving either or both of the source 20 and the substrate 1 in a direction (an arrow direction) intersecting the direction of the arrangement. In the source 20, the cells 20a are arranged so that a moving track pitch pmof each cell 20a become narrow to an arrangement pitch p between cells 20a adjacent along the direction of the arrangement in the straight line. COPYRIGHT: (C)2005,JPO&NCIPI