| 摘要 |
PROBLEM TO BE SOLVED: To provide a coater suitable for carrying out an examination, a studying and development of a new product, and a manufacture method therefor by varying conditions of resolution and a delivering liquid. SOLUTION: The coater 1 provided with monitoring mechanism 16 capable of monitoring, using an image, the spattering state of a liquid drop delivered from a nozzle arrangement 5 in a delivery head 10 is provided. Even if direction of the nozzle arrangement is varied in order to vary the resolution, since the monitoring mechanism 16 is loaded on a capping mechanism 15, its direction is varied by interlocking with the direction of the cap 14 and a relative position relationship of the nozzle arrangement 5 and the monitoring mechanism 16 is maintained at a home position H. Accordingly, even if the direction of the nozzle arrangement 5 is varied, the spattering state of the liquid drop can be simply monitored at a desired condition. COPYRIGHT: (C)2005,JPO&NCIPI
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