DEVICE AND METHOD FOR DRYING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a drying device for extremely reducing a quantity of liquid on a surface of a substrate to become a mist to scatter. SOLUTION: The liquid attached to the upper surface of the substrate W carried on a carrying roller 2 is pressed in a gap between the upper surface of the substrate and an upper straightening vane 10 by air from an upper air knife 11. The pressed liquid is pressed out along the upper surface of the substrate toward one side as the upper straightening vane 10 is disposed in a tilted manner by an air flow produced between the upper surface of the substrate and the upper straightening vane 10 and the air from the upper air knife 11, and eventually flows from the upper surface of the substrate W toward an upper exhaust means 6 to be disposed of outside the drying device. COPYRIGHT: (C)2005,JPO&NCIPI