发明名称 Semiconductor device, metal laminated plate for fabricating circuit on semiconductor, and method of fabricating circuit
摘要 A means for highly precisely and economically fabricating wiring on a semiconductor and highly precisely and economically forming a bump on an electrodes. (1) A semiconductor device comprising a semiconductor, a metal foil for fabricating wiring and conductor wiring on the semiconductor, and a method of fabricating a conductor wiring circuit on a semiconductor, comprising the steps of laying a metal foil for fabricating wiring on the electrode-forming side of the semiconductor, forming a resist wiring pattern by photo-etching the metal foil, etching the metal foil, and removing the resist to form the wiring. (2) A semiconductor device which comprises a multilayer metal foil for fabricating wiring in place of the metal foil for forming wiring of the semiconductor device described in (1); and a method of fabricating conductor wiring having a bump on a semiconductor, comprising the steps of the method described in (1) and further comprising the steps of forming a resist pattern for forming the bump by photo-etching the multilayer metal foil for forming the wiring, forming a bump by selective etching, and removing an etch-stop layer.
申请公布号 US6841877(B2) 申请公布日期 2005.01.11
申请号 US20020169917 申请日期 2002.11.12
申请人 TOYO KOHAN CO., LTD. 发明人 SAIJO KINJI;YOSHIDA KAZUO;OKAMOTO HIROAKI;OHSAWA SHINJI
分类号 H01L21/3213;H01L21/28;H01L21/3205;H01L21/60;H01L21/768;H01L23/52;(IPC1-7):H01L23/48;H01L21/44 主分类号 H01L21/3213
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