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发明名称
改良之总体双道金属镶嵌平坦化系统、方法与设备
摘要
一种图案化的半导体基板之平坦化系统与方法,包含接收一图案化的半导体基板。该图案化的半导体基板系具有填满图案之中的复数之特征部的一导电性互连材料。该导电性互连材料系具有一表层部。该表层部系具有一局部性不均匀度。去除该表层部之一主体部,俾平坦化该表层部。映射于一实质上局部平坦化的表层部,俾确定一总体不均匀度。蚀刻该实质上局部平坦化的表层部,俾实质上消除该总体不均匀度。
申请公布号
TW200501260
申请公布日期
2005.01.01
申请号
TW093106649
申请日期
2004.03.12
申请人
兰姆研究公司
发明人
雪肯特P 娄荷凯;安祖D 贝利三世;大卫 韩克尔;乔M 库克
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
许峻荣
主权项
地址
美国
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