| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a humidifier with the dew point measuring function following to a response of a dry gas mass flow rate. <P>SOLUTION: The dew point temperature is calculated from a saturated steam table, by determining humidified steam quantity, by using a mass flowmeter instead of a dew point thermometer. Feedback control of dry gas mass flow rate measurement control including measurement of the dry gas mass flow rate Qpv of a mass flow rate controller 2, humidified gas pressure measurement control, and humidified gas measurement control, is executed. Humidified gas dew point control and humidified gas dew point measurement are separately processed. Dew point measurement processing reads humidified gas mass flow rate Qwpv of a thermal type mass flowmeter 6, and calculates a humidified steam flow rate Qw, by subtracting the dry gas mass flow rate Qpv from the humidified gas mass flow rate Qwpv. The thermal type mass flowmeter 6 is a system for determining a mass flow rate by specific heat of measurement gas, and calculates the humidified gas dew point Rpv, by calculating true humidified steam quantity Wpv, by correcting the humidified steam flow rate Qw by a calculation expression for a dry gas conversion value. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
