| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric resonator capable of suppressing deterioration in a resonance characteristic, the piezoelectric resonator, a piezoelectric filter, and a duplexer. <P>SOLUTION: The manufacturing method of the piezoelectric resonator 1 for sequentially forming a lower electrode 5, at least a single piezoelectric thin film layer 6 made of a piezoelectric oxide, and an upper electrode 7 on a substrate 2 incldes: a piezoelectric thin film forming step of forming a piezoelectric oxide film on the lower electrode 5, thereafter forming a resist pattern on the piezoelectric oxide film, etching the oxide film by using the resist pattern for a mask to apply patterning to the piezoelectric oxide film thereby forming a piezoelectric thin film 6; and a first ashing step of carrying out plasma ashing with a gas including oxygen after the piezoelectric thin film forming step. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
