ANTI-POLLUTION EQUIPMENT, ANTI-POLLUTION METHOD, AND ANTI-POLLUTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To on/off-control an anti-pollution equipment without affecting facilities on the semiconductor manufacturing apparatus side.

SOLUTION: A pressure gage 7 for monitoring the pressure in a pipe 4 is installed in the pipe 4 between a plasma type abatement system 5 and a turbopump 3. A controller 8 actuates the plasma type anti-pollution equipment 5 when the pressure measured by the pressure gage 7 is in a specified range, and stops the plasma type abatement system 5 when the pressure measured by the pressure gate 7 is out of the specified range.

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