| 摘要 |
Micro-machined tools and component holders useful for the manufacture, assembly (196), and testing of precision micro-miniature parts are provided, particularly embodiments well adapted for precision micro-miniature systems incorporating optical and/or electronic components including lenses (233, 397), optical fibers (197), and the like. Structure and method find particular applicability in the precision optical systems of the read, write, or read/write heads of optically assisted storage devices for digital computers. Removable tools are used to temporarily position while components are glued or otherwise fixed into place during assembly, and then completely removed for use with another head assembly. Break-away tools or holders (326) typically include three major portions: an element holder, a handle (313, 314), and a break-away neck portion connecting the holder with the handle. The element holder provides a mounting block (395) for an optical, electrical, or mechanical element. Once the elements are attached to the mounting blocks, they are moved into position within the larger assembly via the handle. The mounting block (395) is glued to the assembly and a small predictable force is applied to the handle to break the neck and separate the handle from the holder which is at that time attached to the assembly. Tools may be formed by photolithographically patterned and etching a substrate such as silicon to selectively carve the substrate. Structures formed from plated metal, either on a base material, or made entirely of metal are also provided by the invention. Several embodiments of process for forming the inventive structures are also provided.
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