| 摘要 |
PROBLEM TO BE SOLVED: To provide a vaporizer which is capable of restraining a solid CVD material from separating out or adhering near the exhaust vent of a vaporizing chamber even in the case that carrier gas that is supplied together with the CVD material is reduced in feed rate or the solid CVD material dissolved into a solvent is increased in concentration, and capable of stably and extremely efficiently vaporizing and feeding the CVD material of a desired concentration at a desired flow rate for a long period of time. SOLUTION: The vaporizer is equipped with a CVD material feeding unit that is provided with the exhaust pipe of a double structure which has an outer pipe whose outer wall is tapered or curved so as to be gradually reduced in an outer diameter toward the exhaust vent of the vaporizing chamber. COPYRIGHT: (C)2005,JPO&NCIPI
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