CLEANING APPARATUS TO IMPROVE ENDURANCE AND PREVENT METAL CONTAMINATION DETERIORATING QUALITY OF PRODUCT IN CLEANING FINE STRUCTURE

摘要

PURPOSE: A cleaning apparatus is provided to improve endurance and prevent metal contamination deteriorating the quality of a product in cleaning a fine structure by remarkably controlling corrosion resistance with respect to hydrogen fluoride even in the surroundings for forming supercritical liquid. CONSTITUTION: An object to be cleaned is cleaned by high pressure fluid in a high pressure receptacle(9). A cleaning additive supplying unit supplies cleaning additive to the high pressure fluid such that the cleaning additive is to be added to the high pressure fluid in a cleaning process. The high pressure fluid containing the cleaning additive is supplied/exhausted to/from the high pressure receptacle by a pipe system. At least a part of the surface of the pipe system that comes in contact with the cleaning additive on the upper stream of the high pressure receptacle and comes in contact with the cleaning additive of the high pressure receptacle, is made of a Fe-based alloy containing chrome of more than 20 weight percent.