| 摘要 |
PURPOSE: A flat panel display manufacturing apparatus is provided to improve a throughput and to reduce a manufacturing cost by adding a laser process chamber to the flat panel display manufacturing apparatus. CONSTITUTION: A flat panel display manufacturing apparatus includes a plurality of process chambers of various kinds and a conveying chamber. The process chambers include an introducing chamber, plasma cleaning chamber, organic film forming chamber, a sputter chamber, a CVD(Chemical Vapor Deposition) chamber, a metal electrode vaporization chamber, a can sealing chamber, a thin film sealing chamber. At least one of the sputter chamber, a CVD(Chemical Vapor Deposition) chamber, a metal electrode vaporization chamber, a can sealing chamber, a thin film sealing chamber is implemented with one or more laser process chambers. The laser process chambers form a desired pattern or remove an unnecessary portion without using a metal shadow mask. The process chamber and the laser process chamber are integrated in one structure.
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