| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflection mirror capable of securing the profile irregularity of an effective reflection surface, and an exposure device having the reflection mirror. SOLUTION: In the case of cutting off a glass substrate 11 from base material 10 to be the reflection mirror, the striae state of the inside of the base material 10 is previously measured by inspection or the like using transmitted light. In this case, the substrate 11 is cut off at a position where the striae 13 inside the base material 10 is nearly parallel with the surface (at least the effective reflection surface of the reflection surface) 11a of the substrate 11 on the surface 11a. The substrate 11 cut off in such a way secures the excellent profile irregularity because the shape of the striae 13 does not appear even when the surface 11a is ground with a tool. COPYRIGHT: (C)2005,JPO&NCIPI |
