| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and device for sealing an OLED device formed on a soft substrate. <P>SOLUTION: The OLED device is subjected to moisture-proofing processing by a sealing method for inserting the OLED device between two transparent dielectric metal oxide layers. The oxide layers are formed within a chamber, and the chamber includes a plurality of processing stations for successively forming atomic layers of oxide along the passes of the flexible substrate. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
