摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam trimming method with which fused portion of a ceramic basic material after removing an electrode is crystallized in good condition. <P>SOLUTION: In the laser beam trimming method for irradiating and removing the electrode 1A as an object for trimming with the laser beam L1, a ceramic fused portion after removing the electrode and the surrounding electrode by irradiating with the laser beam L1, is slowly cooled by heat-controlling with the laser beam L2 for slow-cooling from a heat source for slow-cooling with another one to the above laser beam L1. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |